High Quality factor photonic crystal nanobeam cavities
نویسندگان
چکیده
We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 1.4 × 10. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a Quality factor of nearly 7.5 × 10. The effect of cavity size on mode frequency and Quality factor was simulated and then verified experimentally.
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